China plans giant particle accelerator-powered chip factory
China plans giant particle accelerator-powered chip factory
interestingengineering.com China plans giant particle accelerator-powered chip factory
Researchers at Tsinghua University in China have developed a new lithography process to help boost the Chinese semiconductor industry.
2 comments
How does a particle accellerator power a chip factory??
The particle accelerator is meant to produce the ultraviolet radiation used in the EUV lithography. It's half avoiding ASML patents and half for future proofing since it has some benefits to the laser-tindroplet method of UV production in future speculative lithography processes.